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Using Cosmos FloWorks for analyse the detector.
Hladík, Jaroslav ; Špinka, Jiří (referee) ; Maxa, Jiří (advisor)
This work follow up gas fluxion problems in detector chamber of enviromental scanning electron microscope. Describes basic electron microscopes characteristic and evaluation output signal. Basic focus of this work is proposal placing screening in detector in surroundings programme SolidWorks 2008. There is by the help of system COSMOS FloWorks effected analysis pumping gas with different pressure and mutual position which has significant influence in given fluxion conditions. Programmatic surroundings makes it possible to simulation 3D and evaluation fluxion method final capacities by setting fundamental conditions of solving, which would have been next to real behaviour of gas in real detector.
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Scintillation SE detector for ESEM
Odehnal, Adam ; Špinka, Jiří (referee) ; Jirák, Josef (advisor)
Thesis deals with theoretical knowledge about scanning electron microscopy and environmental scanning electron microscopy. It describes principle of operation, signals generated by interaction between primary electron beam and specimen and means of detection of secondary electron signal in environmental conditions using scintillation detector. Furthermore, thesis focuses on optimization of detection od secondary electrons by adjusting electrode system of scintillation detector. Computer program Simion is used for modelling signal electron trajectories for proper adjustments. Simulation were starting-point for adjusting the design of the detector. Detection efficiency of adjusted detector was determined by evaluating signal magnitude from captured images, secondary electron detection capability from voltage contrast and quality of the captured images from signal/noise ratio.
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Using Cosmos FloWorks for analyse the detector.
Bordovský, Petr ; Špinka, Jiří (referee) ; Maxa, Jiří (advisor)
This work deal with the analysis of influence of pressure‘s sizes in vacuum chamber of specimen Evironmental Scanning Electron Microscope and the influence of sizes of aperture diaphragm by scintillation detector. The analysis proceeds in detector of secondary electrons. The detector is modelled by system 3D CAD SolidWorks with the help of system CAE Cosmos FloWorks.
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Possibilites of a secondary electrons bandpass filter for standard SEM
Mika, Filip ; Pokorná, Zuzana ; Konvalina, Ivo ; Khursheed, A.
Secondary electron filtering in Scanning Electron Microscope (SEM) has been in use for over\na decade. This technique uncovers interesting contrasts in an otherwise ordinary SEM image\nwhich can possibly be used for dopant concentration mapping or for discerning the slight molecular weight differences in apparently homogeneous organic materials. Secondary\nelectron filtering of semiconductor samples seems very promising as it may shed light on the mechanism of SEM image contrast between p-doped and n-doped semiconductors, possibly\nallowing to determine dopant concentration from SEM image alone.
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Scintillation SE detector for ESEM
Odehnal, Adam ; Špinka, Jiří (referee) ; Jirák, Josef (advisor)
Thesis deals with theoretical knowledge about scanning electron microscopy and environmental scanning electron microscopy. It describes principle of operation, signals generated by interaction between primary electron beam and specimen and means of detection of secondary electron signal in environmental conditions using scintillation detector. Furthermore, thesis focuses on optimization of detection od secondary electrons by adjusting electrode system of scintillation detector. Computer program Simion is used for modelling signal electron trajectories for proper adjustments. Simulation were starting-point for adjusting the design of the detector. Detection efficiency of adjusted detector was determined by evaluating signal magnitude from captured images, secondary electron detection capability from voltage contrast and quality of the captured images from signal/noise ratio.
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Using Cosmos FloWorks for analyse the detector.
Hladík, Jaroslav ; Špinka, Jiří (referee) ; Maxa, Jiří (advisor)
This work follow up gas fluxion problems in detector chamber of enviromental scanning electron microscope. Describes basic electron microscopes characteristic and evaluation output signal. Basic focus of this work is proposal placing screening in detector in surroundings programme SolidWorks 2008. There is by the help of system COSMOS FloWorks effected analysis pumping gas with different pressure and mutual position which has significant influence in given fluxion conditions. Programmatic surroundings makes it possible to simulation 3D and evaluation fluxion method final capacities by setting fundamental conditions of solving, which would have been next to real behaviour of gas in real detector.
|
|
|
Using Cosmos FloWorks for analyse the detector.
Bordovský, Petr ; Špinka, Jiří (referee) ; Maxa, Jiří (advisor)
This work deal with the analysis of influence of pressure‘s sizes in vacuum chamber of specimen Evironmental Scanning Electron Microscope and the influence of sizes of aperture diaphragm by scintillation detector. The analysis proceeds in detector of secondary electrons. The detector is modelled by system 3D CAD SolidWorks with the help of system CAE Cosmos FloWorks.
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